准分子激光反射镜
特性
高损伤阈值
该反射镜适合于多种范围的高功率准分子激光。这些反射镜覆盖ArF（波长193纳米），KrF（波长248纳米）和XeF（波长352纳米）的激光波长。这些外腔高能量准分子激光镜可以承受高脉冲功率。每片都经单独测试，确保表面平整度优于λ/10，表面质量为10－5划痕/麻点。
技术参数
|
AOI
|
0°
|
|
Substrate Material
|
Fused Silica
|
|
Front Surface Flatness
|
λ/10
|
|
Clear Aperture
|
>80% of Diameter
|
|
Back Surface
|
Fine Ground*
|
|
Diameter
|
Ø1"
|
|
Parallelism
|
≤3 arcmin
|
|
Diameter Tolerance
|
+0.0 / -0.2 mm
|
|
Thickness
|
6.0 ± 0.3 mm
|
|
Surface Quality
|
10-5 Scratch Dig
|
产品型号
|
Item #
|
NB1-H01
|
NB1-H03
|
NB1-H09
|
|
Excimer
|
ArF
|
KrF
|
XeF
|
|
Wavelength
|
193 nm
|
248 nm
|
352 nm
|
|
Average Reflectance
|
>98%
|
>97%
|
>99.5%
|
|
Damage Threshold at 0°AOI
|
3 J/cm2 (10 ns Pulse)
|
5 J/cm2 (10 ns Pulse)
|
5 J/cm2 (10 ns Pulse)
|
