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联系方式：
TEL: 0755-66802236
FAX：0755－22647385
QQ: 2844098291
E-mail: info@hgdtec.com
地址：深圳市南山区桃园路西海明珠大厦F座11楼
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EX50 准分子激光器
特点
l 重复率750Hz
l 内置真空泵及卤素过滤器
l 紧凑体积、高功率输出
l 高可靠长寿命激光腔
l 完美的脉冲稳定性
l 1Billion脉冲光学系统
l 软电晕预电离
应用
l 脉冲激光沉积
l 离子化
l 微加工
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PARAMETER
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F2
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ArF
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KrF
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XeCl
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XeF
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Wavelength nm
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157
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193
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248
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308
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351
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Energy Max. mJ
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2.5
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35
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50
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22
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20
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Average Power @250Hz
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.5
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5
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10
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5
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5
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Average Power @500Hz
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1
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10
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20
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10
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9
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Repetition Rate
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250/500/750
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Dynamic gas lifetime Pulses to 50% energy
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15E6
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25E6
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35E6
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30E6
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30E6
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Shelf life Approx. to 50% energy
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15 days
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90 days
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120 days
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>1 Year
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120 Days
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Pulse Length
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10
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17-20 nS
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Beam Size
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9 X 4 mm
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Stability
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<2% Standard Deviation
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Tube Service
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3 Billion Pulses
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Divergence
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.8 X 1.6 mRad full angle
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Cooling
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Air/Water
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Window Service
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300E6
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500E6
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>1 billion
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200E6
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300E6
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