PARAMETER

F2

ArF

KrF

XeCl

XeF

Wavelength nm

157

193

248

308

351

Energy Max. mJ

10

75

125

65

60

Average Power 60Hz

0.5

4

6

3

3

Average Power @125Hz

1.0

8

12

6

6

Average Power @250Hz

2.0

16

24

13

10

Dynamic gas lifetime Pulses to 50% energy

10E6

15E6

20E6

20E6

20E6

Shelf life Approx. to 50% energy

15 days

60 days

90 days

>6 Months

90 Days

Pulse Length, ns

15-22

Beam Size, mm

 10 X 5

Stability

<2% Standard Deviation

Tube Service

 2 Billion Pulses

Divergence, mRad full angle

 0.8 X 1.5

Cooling

 Air/Water