PARAMETER
F2
ArF
KrF
XeCl
XeF
Wavelength nm
157
193
248
308
351
Energy Max. mJ
20
120
250
125
100
Average Power 20Hz version
0.4
2.0
5
2.5
2
Average Power 50Hz version
0.9
12
4
Shelf life Approx. to 50% energy
10 days
20 days
30 days
6 months
30 Days
Pulse Length
20-26 nS
Beam Size
19 X 7 mm
Divergence
3.0 X 1.2 mRad
Stability
<2% Standard Deviation
Timing Jitter
+/- 2nS
Cooling
Air/water
